Nanometrics, Inc., a leading supplier of advanced integrated and stand-alone metrology equipment for the semiconductor industry, today introduced the newest version of its overlay control system, the ...

This story was originally published on Cybersecurity Dive. To receive daily news and insights, subscribe to our free daily Cybersecurity Dive newsletter. The National Institute of Standards and ...

Nanoimprint lithography (NIL) is a promising technique for fine-patterning with a lower cost than other lithography techniques such as EUV or immersion with multi-patterning. NIL has the potential of ...

Advancing technology nodes with smaller process margins require improved photolithography overlay control. Overlay control at develop inspection (DI) based on optical metrology targets is well ...