This week, it turned out that Shanghai Microelectronics Equipment (SMEE) had applied for a patent covering an EUV lithography ...
likely benefiting manufacturers such as China’s sole semiconductor lithography specialist, Shanghai Micro Electronics Equipment Group (SMEE). The outlay was in response to the United States ...
China has claimed a breakthrough in developing homegrown ... including oxidation furnaces and dry-etching gear. SMEE has developed a lithography machine that can be used to make 28-nanometer chips, ...